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of a single crystal surface, the crystallographic plane, described in terms of its Miller indices, with which the surface is ideally coincident. NOTE-In semiconductor single crystals, where the surface of a wafer cut from the crystal usually corresponds closely (within a degree or several degrees) to a low index plane, such as a {100} or {111} plane, the surface orientation is frequently described in terms of the maximum angular deviation of the mechanically prepared surface from the low index crystallographic plane. [ASTM F1241]
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