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operation definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the performance of one or more steps within a
process
on one machine without
operator
intervention. Examples are
resist
application and soft bake, align/expose, develop/rinse/spin dry,
sputter
etch, and
sputter
deposition
.
See also:
ortho amides definition
outgassing definition
Osmosis definition
opposing reactions definition
Ore definition
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