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normal astigmatism definition

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in the measurement of photolithographic instruments, the difference in Z-axis position at each image site between the sagittal focal surface and the tangential focal surface . Astigmatism is a map of scalar values over the (X,Y) coordinates of the image field . [SEMI P25-94]

See also:

off-axis chromatic aberration definition
Nucleons definition
Nuclides definition
Nuclearity definition
NRZ definition