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micro level definition
A
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D
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H
I
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M
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in automated
material
movement, the level of
material
movement in which the
transfer
partners interact peer-to-peer to synchronize the detailed mechanical steps of a
material
transfer
. [Adapted from SEMI E32-94]
See also:
Metallofullerenes definition
Michelson interferometer definition
microtwin definition
Metallurgy definition
micellar catalysis definition
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