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megasonic definition
A
B
C
D
E
F
G
H
I
J
K
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M
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P
Q
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a
method
of cleaning or etching through which the
liquid
media being employed is mechanically agitated with
frequency
acoustic
energy
to improve
control
or to accelerate the
process
. [1994 National Technology
Roadmap
for Semiconductors]
See also:
merge definition
Matter definition
Materials analysis (cross-reference listing) definition
may definition
mean time to repair (MTTR) definition
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