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mechanical leak definition

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in the measurement of mass flow controller leak rates, a leak caused by a physical crack, pit, scratch or other imperfection in a sealing surface, or contamination or debris on the seals. [Adapted from SEMI E16-90]

See also:

mean cycles between failures (MCBF) definition
mass flow controller (MFC) definition
merge definition
Maxsorb definition
material hazard index (MHI) definition