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mechanical leak definition
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in the measurement of
mass
flow controller
leak
rates, a
leak
caused by a physical crack, pit,
scratch
or other imperfection in a
sealing
surface, or
contamination
or debris on the seals. [Adapted from SEMI E16-90]
See also:
mean cycles between failures (MCBF) definition
mass flow controller (MFC) definition
merge definition
Maxsorb definition
material hazard index (MHI) definition
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