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mechanical characterization definition

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in particle counting, the set of events in which a single wafer or batch of wafers are cycled through the tool so that no intentional process/chemical changes are introduced to the surface or substrate of the wafer; the purpose is to determine particle contributions from the mechanical wafer movement throughout the process tool. [SEMI E14-90]

See also:

melting point (corrected/uncorrected) definition
Mercury Arc definition
mass balance definition
matrix definition
material hazard index (MHI) definition