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mass flow meter (MFM) definition

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a self-contained device, consisting of a mass flow transducer and signal-processing electronics, commonly used in the semiconductor industry to measure the mass flow of gas . [SEMI E29-93]

See also:

masking agent definition
mass flow controller calibration pressure, inlet and outlet definition
megabyte (Mbyte) definition
Meisenheimer complexes/compounds/adducts definition
MCBF definition