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mass flow controller (MFC) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
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a self-contained
device
(consisting of a transducer,
control
valve, and
control
and signal-processing electronics) commonly used in the
semiconductor
industry to measure and regulate the
mass flow of gas
. [SEMI E29-93]
See also:
mask, trimetal definition
mean (productive) time between failures (MTBFp) definition
master drawing definition
meso-Compound definition
Mean Free Path definition
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