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mass flow controller (MFC) definition

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a self-contained device (consisting of a transducer, control valve, and control and signal-processing electronics) commonly used in the semiconductor industry to measure and regulate the mass flow of gas . [SEMI E29-93]

See also:

mask, trimetal definition
mean (productive) time between failures (MTBFp) definition
master drawing definition
meso-Compound definition
Mean Free Path definition