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manufacturing support item (MSI) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
any supply
item
used in the
cleanroom
that indirectly supports the manufacturing process, excluding
process
fluids, equipment, and the facility (for example,
wafer
boxes,
cleanroom
gloves, and wipers). .
See also:
macro level definition
magnetic equivalence definition
mask definition
mask, metal on glass definition
mask definition
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