Add to Del.icio.us Add to Reddit Post to Digg Submit to Newsvine Store at Furl Add to Yahoo Myweb Post to Stumbleupon Post to Google


Periodic Table - Chemistry Definitions - Test your knowledge - Add to Favorites - Useful Resources - Link to Us

localized light scatterer (LLS) definition

 A  B  C  D  E  F  G  H  I  J  K  L  M  N  O  P  Q  R  S  T  U  V  W  X  Y  Z

 


an isolated feature, such as a particle or pit, on or in a wafer surface, resulting in increased light scattering intensity relative to that of the surrounding wafer surface. [ASTM F1241] Also called light point defect . Contrast point defect .

See also:

localized light scatterer (LLS) definition
Low-spin definition
Mach-Zender interferometer definition
maintainability, equipment definition
long-wire pitch definition