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localized light scatterer (LLS) definition
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an isolated feature, such as a
particle
or pit, on or in a
wafer
surface, resulting in increased light
scattering
intensity relative to that of the surrounding
wafer
surface
. [ASTM F1241] Also called light
point defect
. Contrast
point defect
.
See also:
localized light scatterer (LLS) definition
Low-spin definition
Mach-Zender interferometer definition
maintainability, equipment definition
long-wire pitch definition
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