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local clearance definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
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Z
the distance between the external
surface
of a
cassette
or
container
to nearby vertical obstructions such as an
alignment
pocket
. [SEMI E15-91]
See also:
low surface tension fluid definition
LPD definition
lyophilic definition
manufacturing automation protocol (MAP) definition
load height definition
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