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load lock definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
an
isolation
chamber through which wafers are inserted into a
process
tool
.
See also:
Markownikoff rule definition
longitudinal wave definition
low voltage definition
macroscratch definition
load lock definition
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