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linewidth, etched definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
a measurement of the etched
feature
produced on a
wafer
by
transfer
of the
resist
pattern into the
wafer
. Also called final inspect (F/I) and post etch.
See also:
lead flat surface definition
linear Gibbs energy relation definition
Linear Accelerator definition
lift access spacing definition
lift access opening definition
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