Periodic Table
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linewidth, PR definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
a measurement of the
resist
feature
produced on a
wafer
during photo processing after the develop
process
. Also called develop/inspect (D/I) and pre-etch.
See also:
Leghemoglobin definition
leukotrienes definition
Lewis adduct definition
Lewis formula (electron dot or Lewis structure) definition
Ligand definition
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