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leak definition
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in the measurement of mass flow controller leak rates, a path or paths in a sealed system that will pass helium when a partial pressure differential exists. A partial pressure differential can exist for helium even though a total gas pressure differential may not exist. A leak may be a mechanical leak or a permeation leak, or it may have both mechanisms operating in parallel. [Adapted from SEMI E16-90]

See also:
leuco bases definition
lipids definition
lift access spacing definition
lift access definition
lipophilic definition
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