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latch pins definition
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for wafers less than or equal to 150 mm and for wafers equal to 200 mm, pins that engage the
box
latches and accomplish the lock/unlock functions. Latch pins are on the
port
plate. [SEMI E19.4-94]
See also:
kephalins definition
law of universal gravitation definition
LDD definition
latch pins definition
land-grid array definition
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