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laser-scattering light event definition
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a signal pulse that exceeds a preset threshold, generated by the interaction of a laser beam with a
localized light scatterer (LLS)
at a
wafer
surface
as sensed by a detector. [ASTM F1241] Also see
haze
.
See also:
Lanthanides (rare earth metals) definition
latent scratch definition
ketides definition
knot definition
ketazines definition
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