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interface plane definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in
cluster
tools, the vertical
surface
defined by the mating
flange
surfaces of two joined modules. [SEMI E21-94]
See also:
interferometer reference wavefront definition
Ionic Compunds definition
Ionic Geometry definition
integrated model repository (IMR) definition
instance definition
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