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image field definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
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X
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Z
in the measurement of photolithographic instruments, the extent of the
image
along the X and Y axes. It
may
be defined by the limits of
image
quality, as a practical matter, for the intended application. [SEMI P25-94]
See also:
imides definition
IET definition
infrastructure definition
infrasonic definition
inner-sphere (electron transfer) definition
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