|
1 : any single geometric form appearing in a layout as a part of a master drawing or layout (image, drafting) projected on a screen or viewed, usually at some magnification or reduction (image, optical) etched in the silicon dioxide layer on an oxidized silicon wafer (image, oxide) in a photomask or in the emulsion of a photographic film or plate (image, photographic) an exposed and developed coating on a substrate (image, photoresist) [ASTM F127-84 and SEMI P25-94] 2 : in scanning tunneling microscopy, representation of surface topography obtained using the signal from the tip or surface during rastering and under tunneling conditions. 3 : in atomic force microscopy, representation of surface topography obtained by using the signal from the cantilever or surface during rastering in constant force conditions.
|