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hillock definition

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a defect caused by stress that raises portions of a metal (such as aluminum) film above the surface of the film. Localized stress within the metal film may elevate portions of the film through the adjacent dielectric layer, resulting in a metal extrusion and a short to the next metal layer. Also see pyramid.

See also:

Hydrocarbons definition
hole definition
hydrobromic acid (HBr) definition
Hydration Energy definition
horizontal orientation definition