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high-pressure purge system definition
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a purge
system
in which the purged
volume
is entirely on the high-pressure
side
of the
gas
system
. The two valves required are a purge
gas
inlet
valve
and a high-pressure vent
valve
. [SEMI International
Standards
1990, Vol. 1, Glossary]
See also:
hemochromes definition
Helix definition
hexachloroethane (C2Cl6) definition
Heterotrophic organisms definition
Heterotopic definition
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