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helium leak rate definition

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the rate of helium leakage into or out of a gas system, component, fitting, or vessel. The helium leak rate is expressed in standard cubic centimeters per second. [SEMI International Standards 1990, Vol. 1, Glossary]

See also:

Heat of Crystallization definition
High-performance liquid chromatography (HPLC) definition
hemins definition
hexode definition
helicenes definition