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hazardous production materials (HPM) definition

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1 : the chemicals and specialty gases used in processing wafers. 2 : a solid, liquid, or gas that has a degree-of-hazard rating in health, flammability, or reactivity of Class 3 or 4 as ranked by Uniform Fire Code (UFC) Standard No. 79-3 and that is used directly in research, laboratory, or production processes with nonhazardous end products. (1988 Uniform Fire Code, Section 51.102) [SEMI F13-92]

See also:

HAZCOM definition
helium (He) definition
heterocyclic compounds definition
Heteroreceptor definition
highly oriented pyrolytic graphite (HOPG) definition