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global flatness definition
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of a
semiconductor
wafer, the
total indicator reading (TIR)
or the
maximum focal plane deviation
(FPD) relative to a specified
reference plane
within the fixed
quality area
(FQA). [SEMI M1-94] Also see
site
flatness
.
See also:
Gold drugs definition
glycopeptides/glycoproteins definition
Ground State definition
geminate pair definition
Generic Equipment Model (GEM) definition
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