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global flatness definition

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of a semiconductor wafer, the total indicator reading (TIR) or the maximum focal plane deviation (FPD) relative to a specified reference plane within the fixed quality area (FQA). [SEMI M1-94] Also see site flatness.

See also:

Gold drugs definition
glycopeptides/glycoproteins definition
Ground State definition
geminate pair definition
Generic Equipment Model (GEM) definition