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focal surface definition
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in the measurement of photolithographic instruments, the surface determined by finding the focus for each point-like object in the optical image field, with the object fixed with respect to the lens. The focal surface is then the map of Z-axis displacements for the highest contrast at each point in the optical image field as a function of the (x,y) or (r,) coordinates. [SEMI P25-94]

See also:
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Fischer Projection (or Fischer-Tollens Projection) definition
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