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flow volume (Q) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in
equipment
exhaust systems, the volumetric
flow rate
of the effluent
stream
passing a given location in the exhaust
system
per
unit
of time. It is measured in cubic meters per second (m3/s) or cubic feet per minute (cfm). [SEMI S6-93]
See also:
force field definition
force field definition
Fluorescence: molecular fluorescence definition
fork definition
film defects definition
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