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film defects definition
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in the manufacture of photolithographic pellicles, inconsistencies in the
integrity
and
planarity
of the film, including particles, pinholes, scratches, dirt, and a minute quantity of solid. [SEMI P5-94]
See also:
fin definition
fluoresceins definition
Fischer Projection (or Fischer-Tollens Projection) definition
flat zone definition
fluorocarbons definition
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