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feature size definition

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1 : the physical dimensions of an individual pattern element, usually expressed as minimum feature size. For example, a 0.8 micrometer process has a minimum gate dimension of 0.8 micrometer. 2 : in surface characterization, any measurable three-dimensional surface irregularity, not necessarily oriented to any particular reference plane .

See also:

factory host definition
Fahrenheit definition
Ferromagnetic definition
external return definition
Faraday definition