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feature definition

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an area within a single continuous boundary (for example, an aggregate image) that has an optical-density value (gray-level range) that is distinct from the background area outside the feature; for example, the simplest element of a pattern such as a single line, space, or L-bar. [SEMI P19-92]

See also:

film adhesive definition
fasciculation definition
fiber optics definition
Explosive definition
Ferredoxin definition