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extended light scatterer (XLS) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
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T
U
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a
feature
larger than the spatial
resolution
of the inspection equipment, on or in a
wafer
surface, resulting in increased light
scattering
intensity relative to that of the surrounding
wafer
surface
. [ASTM F1241] Also called area defect.
See also:
extrusion transformation definition
FEOL definition
Extrapolate definition
Fatty Acids definition
false positive definition
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