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event definition

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1 : in equipment communications, a detectable occurrence significant to the equipment. [SEMI E30-94] 2 : in equipment communications, the occurrence of a change in the condition of a system, such as lot complete or temperature over range. [SEMI 2309, proposed] Also see alarm.

See also:

etchant definition
Error (types of) definition
epitaxy (epi) definition
event definition
error definition