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equipment definition
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1 : a specific piece of machinery, apparatus,
process
module, or
device
used to execute an
operation
. 2 : the intelligent
system
that communicates with a
host
computer. [SEMI E4-91]
See also:
equipment failure definition
epitaxial layer definition
EPA (Environmental Protection Agency) definition
Equivalence Point definition
equivalent release concentration (ERC) definition
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