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environmental control zones definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
controlled areas in fabrication designed to prevent
contamination
from one
area
reaching any other
area
in the
event
of an incident.
See also:
energy profile definition
environmental control zones definition
entering group definition
Emission of light definition
ellipsometer definition
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