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end slot to other end slot definition
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in quartz and high-temperature wafer carriers, the
center line
of the first
slot
to the
center line
of the
slot
on the other
end
. [SEMI E2-86]
See also:
environmental control zones definition
Enantiomerically Pure/Enantiopure definition
Enantiomeric Purity definition
Enantioenriched definition
electrostatic chuck (ESC) definition
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