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end slot to other end slot definition

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in quartz and high-temperature wafer carriers, the center line of the first slot to the center line of the slot on the other end. [SEMI E2-86]

See also:

environmental control zones definition
Enantiomerically Pure/Enantiopure definition
Enantiomeric Purity definition
Enantioenriched definition
electrostatic chuck (ESC) definition