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electron cyclotron resonance (ECR) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
a technology that uses a high-frequency microwave
energy
source
to create a
plasma
in a confined region using a magnetic
field
for the purpose of etching and
deposition
.
See also:
edge sensor definition
electromagnetic compatibility (EMC) definition
electronic effect of substituents: symbols and signs definition
EHMO definition
Electron Affinity definition
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