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electron beam masks definition

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1 : image mask used in conjunction with E-beam exposure tools; generally of two types: stencil, which is used with proximity E-beam and cell projection tools, and scatterer, which is used with projection E-beam tools (for example, SCALPEL). 2 : a photomask produced on an E-beam mask writer to differentiate from a mask produced with other tools.

See also:

Electron Configuration definition
Electrolytic methods definition
Electron spectroscopy (introduction) definition
Electronics (components) definition
effective charge definition