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edge indent definition

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in dielectrically isolated (DI) wafers, an edge defect that extends from the front surface to the back surface. [SEMI M22-92]

See also:

electromigration (EM or EMG) definition
Electronic Geometry definition
electromigration (EM or EMG) definition
edge perimeter distance definition
Electron paramagnetic resonance (EPR, ESR) definition