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dry plasma etch definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
processes that use a
mixture
of physical and chemical etching that employ reactive ionized
gas
to remove unprotected portions of a
layer
of
material
. Also called dry
etch
and plasma
etch
. Contrast with reactive
ion
etch
.
See also:
edge contour definition
dual inline package (DIP) definition
ECR definition
Doppler effect definition
ECR definition
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