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design flow rate definition
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in flow limiting devices, the maximum
flow rate
exiting a
gas
cylinder valve
when the
valve
is in a fully open position. All flow rates are given in
standard
liters per minute (slpm). [SEMI S5-93]
See also:
detailed balancing, principle of definition
Devarda’s alloy definition
Desymmetrisation definition
defect level definition
Deposition definition
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