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defect, photomask definition

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any flaw or imperfection in the opaque coating or functional pattern that will reproduce itself in a resist film to such a degree that it is pernicious to the proper functioning of the microelectronic device being fabricated. [SEMI P2-86]

See also:

deep level impurity definition
defect, photomask definition
devitrification definition
degenerate chemical reaction definition
Dehydrogenase definition