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defect, photomask definition
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any flaw or imperfection in the opaque coating or
functional pattern
that will reproduce itself in a
resist
film
to such a degree that it is pernicious to the proper functioning of the microelectronic
device
being fabricated. [SEMI P2-86]
See also:
deep level impurity definition
defect, photomask definition
devitrification definition
degenerate chemical reaction definition
Dehydrogenase definition
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