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deep ultraviolet (DUV) masks definition

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the master pattern or reticle used in DUV projection lithography (generally, wavelengths between 248 nm and 193 nm). The mask contains the pattern that is to be printed on the wafer, usually magnified at 4X.

See also:

density transition definition
Delocalization definition
Desymmetrisation definition
descum definition
Designated area definition