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deep ultraviolet (DUV) masks definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the
master
pattern or
reticle
used in DUV
projection
lithography
(generally, wavelengths between 248
nm
and 193 nm). The
mask
contains the pattern that is to be printed on the wafer, usually magnified at 4X.
See also:
density transition definition
Delocalization definition
Desymmetrisation definition
descum definition
Designated area definition
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