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crystal originated particle (COP) definition

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a surface depression that is formed during soft alkaline chemical treatment of silicon wafer surfaces that contain crystal defects at or close to the wafer surface and that scatters light similarly to a very small particle. [ASTM F1241] Also called surface micro defect.

See also:

damage depth (Tz) definition
damage definition
Crystal Structure (crystal system) definition
cybotactic region definition
Cytochrome P-450 definition