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comet definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
on a substrate, a buildup of
resist
shaped like a comet and generated by a
defect
. [SEMI P3-90] Also called motorboat.
See also:
cleavage plane definition
cleanroom interface chamber (CIC) definition
cloud definition
cisoid Conformation definition
Common Ion Effect definition
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