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chemical-mechanical polish (CMP) definition
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a
process
for the removal of
surface
material
from a
wafer
. The
process
uses chemical and mechanical actions to achieve a mirror-like
surface
for subsequent processing. [SEMI M1-94 and ASTM F1241] Also called chem-mech polish.
See also:
Chirality definition
Chirality Centre definition
Chirality Centre definition
charge-transfer complex definition
chelation definition
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