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chemical vapor deposition definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
use a
vapor
transport
mechanism
in which the gaseous
reactants
decompose and recombine to form some desired
thin film
.
Decomposition
and
reaction
are helped by having a heated
substrate
.
See also:
chlorine (Cl) definition
chemically amplified resist definition
character set definition
character misalignment definition
chemiluminescence definition
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