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chemical amplification definition

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used in photolithography to describe a process in which process exposure sensitivity of a photoresist is enhanced through secondary chemical reactions that are triggered by a primary photochemical reaction. [1994 National Technology Roadmap for Semiconductors] Also see chemically amplified resist.

See also:

chemically induced dynamic nuclear polarization (CIDNP) definition
Chemical Change definition
character spacing definition
chemically amplified resist definition
chelation definition