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carrier area definition

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in 200 mm quartz and high-temperature wafer carriers, the area that includes the angle (in degrees) from the intersection of the horizontal center line of the wafers to the top side members on the right side and on the left side. [SEMI E2.2-88]

See also:

cause-and-effect diagram definition
cephalins (kephalins): definition
carrier area definition
cascade rinse definition
central line definition