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carrier area definition
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in 200 mm quartz and high-temperature wafer carriers, the
area
that includes the angle (in degrees) from the intersection of the horizontal
center line
of the wafers to the top
side
members on the right
side
and on the left
side
. [SEMI E2.2-88]
See also:
cause-and-effect diagram definition
cephalins (kephalins): definition
carrier area definition
cascade rinse definition
central line definition
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