buried layer definition

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buried layer definition

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1 : a conductive layer between two less conductive films; for example, a localized n+ region in a p-type wafer that reduces the npn collector series resistance for integrated circuit transistors fabricated in an n-type epitaxial layer deposited on the p-type wafer. 2 : in epitaxial silicon wafers, a diffused region in a substrate that is, or is intended to be, covered with an epitaxial layer. [SEMI M18-94 and ASTM F1241] Also called subdiffused layerand diffusion under film.

buried layer definition

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